AXCELIS TECHNOLOGIES INC (ACLS)
Sector: Information Technology
Named Executive Officers
Compensation data for top executives (showing up to 3 years of data)
| Executive | Year | Salary | Bonus | Stock Awards | Option Awards | Non-Equity Incentive Comp | Other Compensation | Total Compensation |
|---|---|---|---|---|---|---|---|---|
| Russell J. Low President and Chief Executive Officer | 2025 | $608,654 | $0 | $3,852,701 | $0 | $627,522 | $11,517 | $5,100,394 |
| 2024 | $633,000 | $0 | $3,217,435 | $0 | $431,706 | $11,367 | $4,293,508 | |
| 2023 | $633,000 | $0 | $3,076,368 | $0 | $431,706 | $9,900 | $4,150,974 |
| Executive | Year | Salary | Bonus | Stock Awards | Option Awards | Non-Equity Incentive Comp | Other Compensation | Total Compensation |
|---|---|---|---|---|---|---|---|---|
| James G. Coogan Executive Vice President and Chief Financial Officer | 2025 | $466,346 | $0 | $1,541,055 | $0 | $336,562 | $11,517 | $2,355,480 |
| 2024 | $485,000 | $0 | $1,072,478 | $0 | $231,539 | $11,367 | $1,800,384 | |
| 2023 | $123,115 | $0 | $960,528 | $0 | $231,539 | $2,238 | $1,317,420 |
| Executive | Year | Salary | Bonus | Stock Awards | Option Awards | Non-Equity Incentive Comp | Other Compensation | Total Compensation |
|---|---|---|---|---|---|---|---|---|
| Eileen J. Evans Executive Vice President, HR and Legal, and General Counsel | 2025 | $384,615 | $0 | $898,938 | $0 | $237,923 | $91,517 | $1,612,994 |
| 2024 | $18,462 | $0 | $864,978 | $0 | $0 | $0 | $883,440 | |
| 2023 | $0 | $0 | $0 | $0 | $0 | $0 | $0 |
| Executive | Year | Salary | Bonus | Stock Awards | Option Awards | Non-Equity Incentive Comp | Other Compensation | Total Compensation |
|---|---|---|---|---|---|---|---|---|
| Gregory F. Redinbo Executive Vice President, Marketing and Applications | 2025 | $312,500 | $0 | $770,590 | $0 | $193,313 | $11,449 | $1,287,852 |
| 2024 | $325,000 | $0 | $643,532 | $0 | $132,990 | $4,331 | $1,105,854 | |
| 2023 | $310,000 | $0 | $615,376 | $0 | $209,343 | $3,400 | $1,138,119 |
| Executive | Year | Salary | Bonus | Stock Awards | Option Awards | Non-Equity Incentive Comp | Other Compensation | Total Compensation |
|---|---|---|---|---|---|---|---|---|
| Gerald M. Blumenstock Executive Vice President, Research, Development, and Engineering | 2025 | $312,500 | $0 | $770,590 | $0 | $193,313 | $11,449 | $1,287,852 |
| 2024 | $325,000 | $0 | $643,532 | $0 | $132,990 | $11,231 | $1,112,754 | |
| 2023 | $181,250 | $0 | $714,997 | $0 | $219,473 | $81,563 | $1,197,282 |
| Executive | Year | Salary | Bonus | Stock Awards | Option Awards | Non-Equity Incentive Comp | Other Compensation | Total Compensation |
|---|---|---|---|---|---|---|---|---|
| Christopher J. Tatnall Executive Vice President, Global Customer Operations | 2025 | $312,500 | $0 | $770,590 | $0 | $193,313 | $11,449 | $1,287,852 |
| 2024 | $325,000 | $0 | $643,532 | $0 | $132,990 | $11,231 | $1,112,754 | |
| 2023 | $310,808 | $0 | $367,365 | $0 | $209,888 | $9,900 | $897,961 |